Get Advances in Electronics and Electron Phisics. Vol. 49 PDF

By Author Unknown

ISBN-10: 0080577148

ISBN-13: 9780080577142

ISBN-10: 0120146495

ISBN-13: 9780120146499

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By Author Unknown

ISBN-10: 0080577148

ISBN-13: 9780080577142

ISBN-10: 0120146495

ISBN-13: 9780120146499

Show description

Read or Download Advances in Electronics and Electron Phisics. Vol. 49 PDF

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Additional info for Advances in Electronics and Electron Phisics. Vol. 49

Sample text

Under the same conditions, but for 6 # n/2 we have by virtue of (99-100): A=A+p, $=$+v (1 16) In the general case the magnitudes and $ depend not only on A and $ and the parameters of a compensator, but on Aip and M of the operating light beam as well. The procedure for calculating the generalized relative reflectivity = tan$eiZ (1 17) consists in solving the integral equations describing the conditions for minimizing the output light intensity when using an operating light beam of arbitrary aperture and any spectral width.

The fact is that utilization of an operating light beam with a sufficiently large aperture and wide spectrum expands the possibilities of ellipsometry. , 1978). The second problem consists in substantiating the applicability of the macroscopic Maxwell equations to describe the processes of light reflection from samples with thin (100-100OA)and superthin (from units up to some tenths of angstroms) films present on their surfaces. This problem also includes the question concerning the interpretation of the results of the ellipsometric study of adsorption-desorption processes.

As a compensator one can use I/4 plates of mica or quartz (when working at wavelengths greater 40 A. V. RZHANOV AND K. K. SVITASHEV TABLE I1 BIBLIOGRAPHY ON EL LIP SO MET^ CONFIGURATIONS ~~~ Ellipsometer type Manual ellipsometer Ellipsometric microscope Automatic ellipsometer ~ References Archer (1968) Aspnes (1975a) Azzam (1 9764 Demichelis ef al. (1 969) Edwards et al. (1975) Hazebroek and Holscher (1 973) Henty and Jerrard (1 976) Jerrard (1969b) Kudo ef al. (1968) Lihl et al. (1967) Monin et nl.

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Advances in Electronics and Electron Phisics. Vol. 49 by Author Unknown


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